This equipment is suitable for the cleaning of 6", 7", 9" masks used in the industry.
It is equipped with multiple precision filtration systems, effectively ensuring cleanliness levels that meet process requirements of Class 10/100.
The ion air blowing process can achieve 360° cleaning, ensuring high precision cleaning requirements for the process.
It supports the main communication protocols of EAP/MES/AMHS, and supports SECS/GEM200/300 for device connection with OHT/PGV/AGV equipment to meet SEMIS2 and CE semiconductor manufacturing standards and certification.